1 option
Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / Warren K. Gladden, Stephen R. Slaughter, Walter M. Duncan, Aslan Baghdadi.
- Format:
- Book
- Government document
- Author/Creator:
- Gladden, Warren K., author.
- Series:
- NIST special publication ; 400-81.
- NIST special publication ; 400-81
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1988.
- System Details:
- text file
- Notes:
- 1988.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 927169698
- Publisher Number:
- GOVPUB-C13-f13459a98a436bc16d5c31ff972e60b3
- Access Restriction:
- Open Access Unrestricted online access
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.