Advances in metrology for x-ray and EUV optics. IX : 24 August - 4 September 2020 online only, California, United States / edited by Lahsen Assoufid, Haruhiko Ohashi, Anand Asundi.

Format:

Book

Contributor:

Asundi, Anand, editor.

Ohashi, Haruhiko, editor.

Assoufid, Lahsen, editor.

Series:

Proceedings of SPIE--the International Society for Optical Engineering ; Volume 11492.

Proceedings of SPIE ; Volume 11492

Language:

English

Subjects (All):

Optical measurements--Congresses.

Optical measurements.

Physical Description:

1 online resource (154 pages)

Place of Publication:

Bellingham, Washington : SPIE, [2020]

Contents:

Absolute flatness measurements by Fizeau interferometer and 3D scanning deflectometric profiler / Author(s): Yohan Kondo; Youichi Bitou

Raytracing the long trace profiler / Author(s): Peter Z. Takacs; Ian Lacey; Valeriy V. Yashchuk

Multifunctional light beam source for surface slope measuring long trace profilers / Author(s): Valeriy V. Yashchuk; Ian Lacey; Kevan Anderson; Jeff Dickert; Brian V. Smith; Peter Z Takacs

Uncertainty of figure error measurement by non-contact three dimensional nano-profiler using normal vector tracing method / Author(s): Kota Hashimoto; Takeshi Ashizawa; Mikiya Ikuchi; Katsuyoshi Endo

Surface metrology of cylindrical mirrors with sagittal curvature in low spatial frequency range / Author(s): Artur C. Pinto; Bernd C. Meyer; Sergio A. L. Luiz; Yuri R. Tonin; Regis S. de Oliveira; Flavio A. Borges; Lucas M. Volpe; Gabriel V. Claudiano; Renan R. Geraldes

Performance evaluation of JTEC coordinate measuring machine / Author(s): Hiroki Nakamori; Masahiko Kanaoka

The pivot bearing rotation mechanism test for stitching interferometer measurement / Author(s): Ming-Ying Hsu; Gung-Chian Yin; Bo-Yi Chen; Chien-yu Lee; Shang-Wei Lin; Hok-Sum Fung; Yu-Shan Huang

Development of high precision mirrors using algorithm-based stitching interferometry and profile coating technique / Author(s): Qiaoyu Wu; Qiushi Huang; Yingna Shi; Xudong Xu; Runze Qi; Zhong Zhang; Yumei He; Jie Wang; Zhanshan Wang

Characterization of groove density variation of VLS gratings with ALS XROL LTP-II in different operation modes / Author(s): Ian Lacey; Valeriy V. Yashchuk

In-situ metrology for adaptive x-ray optics with an in-position LTP system in the soft x-ray beamline / Author(s): Shang-Wei Lin; Duan-Jen Wang; Chih-Yu Hua; Hok-Sum Fung; Ming-Ying Hsu; Gung-Chian Yin

Reflective optics for EUV/x-ray sources at Thales SESO: possibilities and perspectives / Author(s): Luca Peverini; H. Guadalupi; T. Michel; S. Perrin; R. Neviere; Christian du Jeu

A test bench of X-ray optics for next-generation high-energy high-flux X-ray beamlines / Author(s): Hirokatsu Yumoto; Haruhiko Ohashi; Hiroshi Yamazaki; Yasunori Senba; Takahisa Koyama; Kenji Tamasaku; Ichiro Inoue; Taito Osaka; Jumpei Yamada; Makina Yabashi; Shunji Goto

Improvement on x-ray beam image by plane mirrors and x-ray windows for a modern x-ray beamline aiming at next generation light source / Author(s): Yasunori Senba; Hirokatsu Yumoto; Takahisa Koyama; Takanori Miura; Hikaru Kishimoto; Yasuhiro Shimizu; Hiroshi Yamazaki; Haruhiko Ohashi

X-ray interferometry technique using an x-ray microfocus laboratory source / Author(s): M. Voevodina; S. Lyatun; A. Barannikov; I. Lyatun; I. Snigireva; A. Snigirev

Development of shape measurement system for high precision Wolter mandrel / Author(s): Takehiro Kume; Hirokazu Hashizume; Kentarou Hiraguri; Yusuke Matsuzawa; Yoichi Imamura; Hiroaki Miyashita; Takahiro Saito; Gota Yamaguchi; Yoko Takeo; Yasunori Senba; Hikaru Kishimoto; Haruhiko Ohashi; Hidekazu Mimura

Design of two-stage soft-X-ray nano-focusing system with a ring-focusing mirror and quasi-Wolter mirror / Author(s): Yoko Takeo; Hiroto Motoyama; Takenori Shimamura; Takashi Kimura; Takehiro Kume; Yusuke Matsuzawa; Takahiro Saito; Yoichi Imamura; Hiroaki Miyashita; Kentarou Hiraguri; Hirokazu Hashizume; Yasunori Senba; Hikaru Kishimoto; Haruhiko Ohashi; Hidekazu Mimura

Single-shot speckle tracking method based on wavelet transform and multi-resolution analysis / Author(s): Zhi Qiao; Xianbo Shi; Lahsen Assoufid

Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing / Author(s): Takenori Shimamura; Yoko Takeo; Takashi Kimura; Hirokazu Hashizume; Yasunori Senba; Hikaru Kishimoto; Haruhiko Ohashi; Hidekazu Mimura

X-ray wavefront characterization with grating interferometry using an x-ray microfocus laboratory source / Author(s): Shuai Zhao; Ke-yi Wang; Guang-yu Cheng; Yuan Shen; Yu-shan Wang; Lei Zhang.

Notes:

Description based on: online resource; title from PDF information screen (SPIE, viewed March 30, 2023).

ISBN:

1-5106-3791-5