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Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
- Format:
- Book
- Series:
- SPIE proceedings series Micromachining technology for micro-optics and nano-optics II
- Language:
- English
- Subjects (All):
- Integrated optics--Design and construction--Congresses.
- Integrated optics.
- Miniature electronic equipment--Design and construction--Congresses.
- Miniature electronic equipment.
- Optoelectronic devices--Congresses.
- Optoelectronic devices.
- Micromachining--Congresses.
- Micromachining.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Nanotechnology--Congresses.
- Nanotechnology.
- Other Title:
- Micromachining technology for micro-optics.
- Place of Publication:
- [Place of publication not identified] SPIE 2004
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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