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Optical micro- and nanometrology in manufacturing technology : 29-30 April, 2004, Strasbourg, France
- Format:
- Book
- Series:
- Proceedings of SPIE Optical micro- and nanometrology in manufacturing technology
- Language:
- English
- Subjects (All):
- Optical measurements--Industrial applications--Congresses.
- Optical measurements.
- Place of Publication:
- [Place of publication not identified] SPIE 2004
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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