MEMS/MOEMS technologies and applications II : 10-12 November, 2004, Beijing, China

Format:

Book

Contributor:

Ma, Zhichun, Contributor.

Chen, Xuyuan, Contributor.

Jin, Guofan, Contributor.

Society of Photo-Optical Instrumentation Engineers, Content Provider.

Guo jia zi ran ke xue ji jin wei yuan hui (China), Content Provider.

Zhongguo guang xue xue hui, Content Provider.

Series:

SPIE proceedings series MEMS/MOEMS technologies and applications II

Language:

English

Subjects (All):

Microelectromechanical systems--Congresses.

Microelectromechanical systems.

Optoelectronic devices--Congresses.

Optoelectronic devices.

Place of Publication:

[Place of publication not identified] SPIE 2004

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph