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Optomechatronic sensors, actuators, and control : 25-26 October 2004, Philadelphia, Pennsylvania, USA
- Format:
- Book
- Series:
- SPIE proceedings series Optomechatronic sensors, actuators, and control
- Language:
- English
- Subjects (All):
- Mechatronics--Industrial applications--Congresses.
- Mechatronics.
- Optical detectors--Congresses.
- Optical detectors.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Place of Publication:
- [Place of publication not identified] SPIE 2004
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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