1 option
Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany
- Format:
- Book
- Series:
- Proceedings of SPIE Modeling aspects in optical metrology
- Language:
- English
- Subjects (All):
- Optical measurements--Design and construction--Congresses.
- Optical measurements.
- Integrated circuits--Congresses.
- Integrated circuits.
- Semiconductors--Congresses.
- Semiconductors.
- Place of Publication:
- [Place of publication not identified] SPIE 2007
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.