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Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain / Thomas Becker, Carles Cané, N. Scott Barker, editors.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 6589.
- Proceedings of SPIE, 0277-786X ; v. 6589
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Microtechnology--Congresses.
- Microtechnology.
- Actuators--Industrial applications--Congresses.
- Actuators.
- Detectors--Industrial applications--Congresses.
- Detectors.
- Scanning systems--Congresses.
- Scanning systems.
- Microelectromechanical systems--Industrial applications--Congresses.
- Microtechnology--Industrial applications--Congresses.
- Actuators--Congresses.
- Detectors--Congresses.
- Physical Description:
- 1 online resource (1 v. (various pagings) ) ill. ;
- Place of Publication:
- Bellingham, Wash. : SPIE, c2007.
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- Includes bibliographical references and indexes.
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