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Micromachining and microfabrication process technology XIV : 27 January 2009, San Jose, California, United States
- Format:
- Book
- Series:
- Proceedings of SPIE Micromachining and microfabrication process technology XIV
- Language:
- English
- Subjects (All):
- Micromachining--Design and construction--Congresses.
- Micromachining.
- Microfabrication--Design and construction--Congresses.
- Microfabrication.
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Place of Publication:
- [Place of publication not identified] SPIE 2009
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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