2 options
Integrated circuit metrology : May 4-5, 1982, Arlington, Virginia
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering Integrated circuit metrology
- Language:
- English
- Subjects (All):
- Integrated circuits--Congresses.
- Integrated circuits.
- Measurement--Congresses.
- Measurement.
- Place of Publication:
- [Place of publication not identified] SPIE the International Society for Optical Engineering 1982
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.