2 options
Optical microlithography II : technology for the 1980s : 1983 Microlithography Conferences : 14-15 March 1983, Santa Clara, United States / editor, Harry L. Stover ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Optical Microlithography (Conference) (2nd : 1983 : Santa Clara, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 0394.
- Proceedings of SPIE ; Volume 0394
- Language:
- English
- Subjects (All):
- Microlithography--Congresses.
- Microlithography.
- Integrated circuits--Very large scale integration--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (251 pages).
- Other Title:
- Optical microlithography 2.
- Optical microlithography two.
- Place of Publication:
- Bellingham, Washington : SPIE, 1983.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 26, 2018).
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