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Principles of lithography / Harry J. Levinson.
- Format:
- Book
- Author/Creator:
- Levinson, Harry J., author.
- Series:
- SPIE monograph ; PM304.
- SPIE digital library
- SPIE Press monograph ; PM304
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction.
- Integrated circuits.
- Microlithography.
- Genre:
- Electronic books.
- Physical Description:
- 1 online resource (630 pages).
- Edition:
- Fourth edition.
- Place of Publication:
- Bellingham, Washington, USA : SPIE Press, [2019]
- System Details:
- Mode of access: World Wide Web.
- text file
- Summary:
- "This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus"-- Provided by publisher.
- Contents:
- Preface to the fourth edition
- Preface to the third edition
- Preface to the second edition
- Preface to the first edition
- Chapter 1. Overview of lithography
- Chapter 2. Overview of lithography
- Chapter 3. Photoresists
- Chapter 4. Modeling and thin-film effects
- Chapter 5. Wafer steppers and scanners
- Chapter 6. Overlay
- Chapter 7. Masks and reticles
- Chapter 8. Confronting the diffraction limit
- Chapter 9. Metrology
- Chapter 10. Immersion lithography and the limits of optical lithography
- Chapter 11. Lithography costs
- Chapter 12. Extreme ultraviolet lithography
- Chapter 13. Alternative lithography techniques
- Appendix A. Coherence
- Index.
- Notes:
- "SPIE Digital Library."--Website.
- Includes bibliographical references and index.
- Title from PDF title page (SPIE eBooks Website, viewed 2019-05-03).
- Other Format:
- Online version: Levinson, Harry J., author. Principles of lithography
- Print version
- ISBN:
- 9781510627611
- OCLC:
- 1083675292
- Access Restriction:
- Restricted for use by site license.
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