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Prototyping micro- and nano-optics with focused ion beam lithography / by Kahraman Keskinbora.
- Format:
- Book
- Author/Creator:
- Keskinbora, Kahraman, author.
- Series:
- SPIE spotlight ; SL48.
- SPIE digital library
- SPIE. Spotlight ; SL48
- Language:
- English
- Subjects (All):
- Ion beam lithography.
- Focused ion beams.
- Prototypes, Engineering.
- Integrated circuits--Design and construction.
- Integrated circuits.
- Genre:
- Electronic books.
- Physical Description:
- 1 online resource (vi, 41 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2019.
- System Details:
- Mode of access: World Wide Web.
- text file
- Summary:
- This SPIE Spotlight focuses on the micro-/nano-structuring aspects of focused ion beam (FIB) instrumentation. It is designed as a tutorial with examples of real structures of increasing complexity. Readers with no previous experience with FIB/SEM instrumentation can quickly grasp the basics of ion/matter interactions, surface modification methods, initial alignment and structuring, fabrication of various micro-optic elements, and an outlook of up-and-coming FIB technologies.
- Contents:
- Preface
- 1. Introduction: 1.1. FIB source and column overview; 1.2. Ion / matter interactions; 1.3. Ion-beam spot size as a function of energy and current; 1.4. Patterning parameters and dosage; 1.5. Direct-write ion beam lithography; 1.6. Instrumentation; 1.7. Milling strategy and structural quality
- 2. Micro-/nano-optics prototyping case studies: 2.1. Optimization of grating fabrication; 2.2. Fresnel zone plates' 2.3. Grayscale IBL: micro-Fresnel lenses and kinoforms
- 3. Outlook: 3.1. Plasma FIBs; 3.2. Dedicated IBL systems with multi-ion species; 3.3. Helium ion microscope
- 4. Summary and conclusions
- Acknowledgments
- References.
- Notes:
- "SPIE Digital Library."--Website.
- Includes bibliographical references.
- Title from PDF title page (SPIE eBooks Website, viewed 2019-05-03).
- ISBN:
- 9781510628137
- OCLC:
- 1100834495
- Access Restriction:
- Restricted for use by site license.
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