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Miniaturized systems with micro-optics and micromechanics III : 26-27 January 1998, San Jose, California
- Format:
- Book
- Series:
- SPIE proceedings series Miniaturized systems with micro-optics and micromechanics III
- Language:
- English
- Subjects (All):
- Integrated optics--Congresses.
- Integrated optics.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Micromechanics--Congresses.
- Micromechanics.
- Optical scanners--Congresses.
- Optical scanners.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Place of Publication:
- [Place of publication not identified] SPIE 1998
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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