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Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA
- Format:
- Book
- Series:
- SPIE proceedings series Surface scattering and diffraction for advanced metrology II
- Language:
- English
- Subjects (All):
- Surface roughness--Measurement--Congresses.
- Surface roughness.
- Diffractive scattering--Congresses.
- Diffractive scattering.
- Optical measurements--Congresses.
- Optical measurements.
- Scattering (Physics)--Congresses.
- Scattering (Physics).
- Metrology--Congresses.
- Metrology.
- Place of Publication:
- [Place of publication not identified] SPIE 2002
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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