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Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
- Format:
- Book
- Series:
- SPIE proceedings series Design, process integration, and characterization for microelectronics
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Integrated circuits--Defects--Analysis--Congresses.
- Semiconductors--Characterization--Congresses.
- Semiconductors.
- Semiconductor wafers--Analysis--Defects--Congresses.
- Semiconductor wafers.
- Microelectronics industry--Quality control--Congresses.
- Microelectronics industry.
- Quality control--Congresses.
- Quality control.
- Place of Publication:
- [Place of publication not identified] SPIE 2002
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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