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Optical microlithography XXVI : 26-28 February 2013, San Jose, California, United States / Will Conley, editor ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Optical Microlithography (Conference) (26th : 2013 : San Jose, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 8683.
- Proceedings of SPIE ; Volume 8683
- Language:
- English
- Subjects (All):
- Microlithography--Congresses.
- Microlithography.
- Integrated circuits--Very large scale integration--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (658 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2013.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 26, 2018).
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