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MOEMS and miniaturized systems XII : 4-6 February 2013, San Francisco, California, United States / Wibool Piyawattanametha, Yong-Hwa Park, editors ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Micro Opto Electro Mechanical Systems (12th : 2013 : San Francisco, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 8616.
- Proceedings of SPIE ; Volume 8616
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Physical Description:
- 1 online resource (426 pages).
- Other Title:
- Micro Opto Electro Mechanical Systems and miniaturized systems XII
- Place of Publication:
- Bellingham, Washington : SPIE, 2013.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 20, 2018).
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