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LAMOM : laser applications in microelectronic and optoelectronic manufacturing XVIII : 4-7 February 2013, San Francisco, California, United States / Xianfan Xu [and three others], editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 8607.
- Proceedings of SPIE ; Volume 8607
- Language:
- English
- Subjects (All):
- Lasers--Industrial applications--Congresses.
- Lasers.
- Manufacturing processes--Congresses.
- Manufacturing processes.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (280 pages).
- Other Title:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing
- Place of Publication:
- Bellingham, Washington : SPIE, 2013.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 14, 2018).
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