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Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG / edited by Wolfgang Karthe.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Nanotechnology--Congresses.
- Nanotechnology.
- Integrated optics--Congresses.
- Integrated optics.
- Optical instruments--Design and construction--Congresses.
- Optical instruments.
- Optical instruments--Design and construction.
- Physical Description:
- 1 online resource (ix, 334 pages) : illustrations
- Place of Publication:
- Bellingham, Wash., USA : SPIE, 1994.
- Contents:
- Patterning and fabrication of submicron and nanometer structures
- Fabrication and characterization of devices involving diffractive structures
- Devices based on quantum effects
- Optoelectronic integration
- Poster.
- Notes:
- Description based on publisher supplied metadata and other sources.
- Electronic reproduction, [S.l.], HathiTrust Digital Library, 2010.
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