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Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Optical characterization techniques for high-performance microelectronic device manufacturing
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Semiconductors--Congresses--Testing--Optical methods.
- Integrated circuits--Testing--Congresses--Optical methods.
- Optical pattern recognition--Congresses.
- Optical pattern recognition.
- Place of Publication:
- [Place of publication not identified] SPIE 1994
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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