Laser-assisted micro- and nanotechnologies 2003 : 29 June-3 July 2003, St. Petersburg, Russia

Format:

Book

Conference/Event

Contributor:

Veiko, V. P, Contributor.

Veæiko, V. P., Contributor.

Russia (Federation), Content Provider.

Society of Photo Optical Instrumentation Engineers, Content Provider.

Russia (Federation) Ministerstvo obrazovanii?a?., Content Provider.

Sankt-Peterburgskii institut tochnoi mekhaniki i optiki, Content Provider.

Conference Name:

International Conference on Laser-Assisted Micro- and Nanotechnologies (10th : 2003 : St. Petersburg, Russia)

Series:

SPIE proceedings series Laser-assisted micro- and nanotechnologies 2003

Language:

English

Subjects (All):

Electronic industries--Technological innovations--Congresses.

Electronic industries.

Lasers--Industrial applications--Congresses.

Lasers.

Manufacturing processes--Congresses.

Manufacturing processes.

Micromachining--Congresses.

Micromachining.

Nanotechnology--Congresses.

Nanotechnology.

Place of Publication:

[Place of publication not identified] SPIE 2004

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph