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Systems contamination : prediction, measurement, and control 2014 : 18-19 August 2014, San Diego, California, United States / Nancy Carosso, Joanne Egges, editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 9196.
- Proceedings of SPIE ; Volume 9196
- Language:
- English
- Subjects (All):
- Surface contamination--Congresses.
- Surface contamination.
- Contamination (Technology)--Congresses.
- Contamination (Technology).
- Physical Description:
- 1 online resource (196 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2014.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed December 10, 2018).
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