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Instrumentation, metrology, and standards for nanomanufacturing, optics and semiconductors VIII : 20 August 2014, San Diego, California, United States / Michael T. Postek, Ndubuisi G. Orji, editors ; sponsored and published by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors (Conference) (8th : 2014 : San Diego, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 9173.
- Proceedings of SPIE ; Volume 9173
- Language:
- English
- Subjects (All):
- Nanostructured materials--Congresses.
- Nanostructured materials.
- Microfabrication--Congresses.
- Microfabrication.
- Physical Description:
- 1 online resource (602 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2014.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 13, 2018).
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