1 option
Handbook of critical dimension metrology and process control : a critical review : Microelectronic Processing '93 : 26-30 September 1993, Monterey, CA, United States / editor, Kevin M. Monahan ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Microelectronic Processing '93 Symposium (1993 : Monterey, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 10274.
- Proceedings of SPIE ; Volume 10274
- Language:
- English
- Subjects (All):
- Electronic industries--Production control--Congresses.
- Electronic industries.
- Process control--Congresses.
- Process control.
- Physical Description:
- 1 online resource (x, 358 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1993.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 9, 2018).
- ISBN:
- 1-5106-1032-4
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