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Technology of proximal probe lithography : SPIE Institutes for advanced optical technologies 10 : 3 October 1993, Bellingham, WA, United States / editor, Christie R. K. Marrian ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 10310.
- Proceedings of SPIE ; Volume 10310
- Language:
- English
- Subjects (All):
- Lithography, Electron beam--Congresses.
- Lithography, Electron beam.
- Molecular electronics--Congresses.
- Molecular electronics.
- Physical Description:
- 1 online resource (xi, 413 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1993.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed December 12, 2018).
- ISBN:
- 1-5106-1068-5
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