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Advances in X-ray/EUV optics and components XII : 8-9 August 2017, San Diego, California, United States / Christian Morawe, Ali M. Khounsary, Shunji Goto, editors ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Advances in X-Ray/EUV Optics and Components (Conference) (12th : 2017 : San Diego, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10386.
- Proceedings of SPIE ; Volume 10386
- Language:
- English
- Subjects (All):
- X-ray optics--Congresses.
- X-ray optics.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (386 pages).
- Other Title:
- Advances in X-ray/extreme ultraviolet lithography optics and components XII
- Place of Publication:
- Bellingham, Washington : SPIE, 2017.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed October 29, 2018).
- ISBN:
- 1-5106-1230-0
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