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Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
- Format:
- Book
- Series:
- SPIE proceedings series Micromachining and microfabrication process technology IV
- Language:
- English
- Subjects (All):
- Micromachining--Design and construction--Congresses.
- Micromachining.
- Microfabrication--Congresses.
- Microfabrication.
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Place of Publication:
- [Place of publication not identified] SPIE 1998
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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