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Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September, 1998, Santa Clara, California
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Process, equipment, and materials control in integrated circuit manufacturing IV
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Plasma etching--Congresses.
- Plasma etching.
- Metallizing--Congresses.
- Metallizing.
- Dielectric films--Congresses.
- Dielectric films.
- Place of Publication:
- [Place of publication not identified] SPIE 1998
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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