Lithography for semiconductor manufacturing : microelectronic manufactoring technologies : 19-21 May 1999, Edinburgh, United Kingdom
MLA
Mack, Chris A., Tom Stevenson and Society of Photo-optical Instrumentation Engineers. Lithography for semiconductor manufacturing : microelectronic manufactoring technologies : 19-21 May 1999, Edinburgh, United Kingdom. Bellingham, Washington : SPIE, 1999.
APA
Mack, C., Stevenson, T. & Society of Photo-optical Instrumentation Engineers. (1999). Lithography for semiconductor manufacturing : microelectronic manufactoring technologies : 19-21 May 1999, Edinburgh, United Kingdom. Bellingham, Washington : SPIE.
Chicago
Mack, Chris A., Tom Stevenson and Society of Photo-optical Instrumentation Engineers. Lithography for semiconductor manufacturing : microelectronic manufactoring technologies : 19-21 May 1999, Edinburgh, United Kingdom. Edited by Chris A. Mack and Tom Stevenson. Bellingham, Washington : SPIE, 1999.