1 option
Multilevel interconnect technology : microelectronic manufacturing : 1-2 October 1997, Austin, TX, United States / editors, Divyesh N. Patel, Mart Graef ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 3214.
- Proceedings of SPIE ; Volume 3214
- Language:
- English
- Subjects (All):
- Electronic circuit design--Congresses.
- Electronic circuit design.
- Integrated circuits--Very large scale integration--Design and construction--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (vii, 132 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1997.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 20, 2018).
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