1 option
Microrobotics and microsystem fabrication : intelligent systems and advanced manufacturing : 14-17 October 1997, Pittsburgh, PA, United States / editor, Armin Sulzmann ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 3202.
- Proceedings of SPIE ; Volume 3202
- Language:
- English
- Subjects (All):
- Microfabrication--Congresses.
- Microfabrication.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (x, 238 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1997.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 19, 2018).
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