1 option
Optical microlithography XI : 25-27 February, 1998, Santa Clara, California
- Format:
- Book
- Series:
- SPIE proceedings series Optical microlithography XI
- Language:
- English
- Subjects (All):
- Integrated circuits--Masks--Congresses.
- Integrated circuits.
- Microlithography--Congresses.
- Microlithography.
- X-ray lithography--Congresses.
- X-ray lithography.
- Manufacturing processes--Congresses.
- Manufacturing processes.
- Place of Publication:
- [Place of publication not identified] SPIE 1998
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.