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Dimensional optical metrology and inspection for practical applications III : 5-6 May 2014, Baltimore, Maryland, United States / Kevin G. Harding, Toru Yoshizawa, Song Zhang, editors ; sponsored by SPIE.

SPIE Digital Library Proceedings Available online

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Format:
Book
Contributor:
Harding, Kevin G., editor.
Yoshizawa, Toru, editor.
Zhang, Song (Optical engineer), editor.
Society of Photo-Optical Instrumentation Engineers, sponsoring body.
Series:
Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 9110.
Proceedings of SPIE ; Volume 9110
Language:
English
Subjects (All):
Optical measurements--Congresses.
Optical measurements.
Physical Description:
1 online resource (305 pages).
Place of Publication:
Bellingham, Washington : SPIE, 2014.
Notes:
Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 12, 2018).

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