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Optical microlithography V : 13-14 March 1986, Santa Clara, CA, USA / editor, Harry L. Stover.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering Optical microlithography V
- Language:
- English
- Subjects (All):
- Microlithography--Congresses.
- Microlithography.
- Integrated circuits--Very large scale integration--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (vi, 309 pages) : illustrations
- Place of Publication:
- Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 1986
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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