2 options
Optical microlithography III : technology for the next decade : 1984 Microlithography Conferences : 12-16 March 1984, Santa Clara, United States / editor, Harry L. Stover ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Optical Microlithography (Conference) (3rd : 1984 : Santa Clara, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 0470.
- Proceedings of SPIE ; Volume 0470
- Language:
- English
- Subjects (All):
- Microlithography--Congresses.
- Microlithography.
- Integrated circuits--Very large scale integration--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (269 pages).
- Other Title:
- Optical microlithography 3.
- Optical microlithography three.
- Place of Publication:
- Bellingham, Washington : SPIE, 1984.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 26, 2018).
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