1 option
Micromachined devices and components V : 20-21 September 1999, Santa Clara, California
- Format:
- Book
- Series:
- SPIE proceedings series ; v. 3876 Micromachined devices and components V
- Language:
- English
- Subjects (All):
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Micromechanics--Congresses.
- Micromechanics.
- Micromachining--Congresses.
- Micromachining.
- Place of Publication:
- [Place of publication not identified] SPIE 1999
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.