1 option
Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California
- Format:
- Book
- Series:
- SPIE proceedings series Miniaturized systems with micro-optics and MEMS
- Language:
- English
- Subjects (All):
- Integrated optics--Congresses.
- Integrated optics.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Micromechanics--Congresses.
- Micromechanics.
- Optical scanners--Congresses.
- Optical scanners.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Other Title:
- Miniaturized systems with micro-optics and micromechanics.
- Place of Publication:
- [Place of publication not identified] SPIE 1999
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.