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Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia

SPIE Digital Library Proceedings Available online

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Format:
Book
Conference/Event
Contributor:
Chiao, Jung-Chih, Contributor.
University of Adelaide, Content Provider.
University of New South Wales, Content Provider.
Society of Photo-Optical Instrumentation Engineers, Content Provider.
Conference Name:
International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2004 : University of New South Wales)
Series:
SPIE proceedings series Micro- and nanotechnology
Language:
English
Subjects (All):
Microelectromechanical systems--Materials--Congresses.
Microelectromechanical systems.
Microtechnology--Materials--Congresses.
Microtechnology.
Nanotechnology--Congresses.
Nanotechnology.
Electronic packaging--Congresses.
Electronic packaging.
Other Title:
Micro- and Nanotechnology
Place of Publication:
[Place of publication not identified] SPIE 2005
Language Note:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph

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