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Advances in Patterning Materials and Processes XXXVI : 25-28 February 2019, San Jose, California, United States / Roel Gronheid, Daniel P. Sanders, editors.
- Format:
- Book
- Conference/Event
- Conference Name:
- Advances in Patterning Materials and Processes (Conference) (36th : 2019 : San Jose, Calif.)
- Advances in Patterning Materials and Processes (Conference)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 10960.
- Proceedings of SPIE
- Language:
- English
- Subjects (All):
- Lithography--Congresses.
- Lithography.
- Physical Description:
- 1 online resource (464 pages) : illustrations.
- Place of Publication:
- Bellingham, Wash. : SPIE, [2019]
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5106-2568-2
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