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MOEMS and Miniaturized Systems XVIII : 2-4 February 2019, San Francisco, California, United States / Wibool Piyawattanametha, Yong-Hwa Park, Hans Zappe, editors.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 10931.
- Proceedings of SPIE. 5200- ; Volume 10931
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (288 pages) : illustrations.
- Place of Publication:
- Bellingham, Washington : SPIE, [2019]
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5106-2505-4
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