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Advances in metrology for x-ray and EUV optics IV : 12 August 2012, San Diego, California, United States / Lahsen Assoufid, Peter Z. Takacs, Anand Krishna Asundi, editors ; sponsored and published by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 8501.
- Proceedings of SPIE ; Volume 8501
- Language:
- English
- Subjects (All):
- Optical measurements--Congresses.
- Optical measurements.
- Optical instruments--Design and construction--Congresses.
- Optical instruments.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (180 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2012.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed October 18, 2018).
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