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MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA
- Format:
- Book
- Series:
- Proceedings of SPIE MOEMS and miniaturized systems VII
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Micromechanics--Congresses.
- Micromechanics.
- Optical scanners--Congresses.
- Optical scanners.
- Place of Publication:
- [Place of publication not identified] SPIE 2008
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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