1 option
Integrated circuit metrology, inspection, and process control IV : microlithography '90 : 4-8 March 1990, San Jose, CA, United States / editor, William H. Arnold ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1261.
- Proceedings of SPIE ; Volume 1261
- Language:
- English
- Subjects (All):
- Integrated circuits--Congresses.
- Process control--Congresses.
- Physical Description:
- 1 online resource (695 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1990.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 13, 2018).
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