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Micro- and nanotechnology sensors, systems, and applications III : 25-29 April 2011, Orlando, Florida, United States
- Format:
- Book
- Series:
- Proceedings of SPIE Micro- and nanotechnology sensors, systems, and applications III
- Language:
- English
- Subjects (All):
- Nanoelectronics--Congresses.
- Nanoelectronics.
- Nanoelectromechanical systems--Congresses.
- Nanoelectromechanical systems.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Nanophotonics--Congresses.
- Nanophotonics.
- Nanotechnology--Congresses.
- Nanotechnology.
- Place of Publication:
- [Place of publication not identified] SPIE 2011
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 0-8194-8605-1
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