Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA

Format:

Book

Contributor:

Vladimirsky, Yuli, Contributor.

Coane, Philip J., Contributor.

Society of Photo-Optical Instrumentation Engineers, Content Provider.

Sandia National Laboratories, Content Provider.

Solid State Technology (Organization), Content Provider.

Semiconductor Equipment and Materials International, Content Provider.

Series:

SPIE proceedings series Materials and device characterization in micromachining III

Language:

English

Subjects (All):

Micromachining--Congresses.

Micromachining.

Electromechanical devices--Congresses.

Electromechanical devices.

Micromechanics--Congresses.

Micromechanics.

Place of Publication:

[Place of publication not identified] SPIE 2000

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph