Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France / editor, Bernard Courtois [and five others] ; sponsored by SPIE.

Format:

• Book

Contributor:

• Courtois, Bernard, editor.
• Society of Photo-optical Instrumentation Engineers, sponsoring body.

Series:

• Proceedings of SPIE--the International Society for Optical Engineering ; Volume 4019.
• Proceedings of SPIE ; Volume 4019

Language:

English

Subjects (All):

• Microelectromechanical systems--Congresses.
• Optoelectronic devices--Congresses.
• Micromachining--Congresses.

Physical Description:

1 online resource (596 pages).

Place of Publication:

Bellingham, Washington : SPIE, 2000.

Notes:

Description based on: online resource; title from title screen (SPIE Digital Library, viewed October 27, 2018).