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MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA
- Format:
- Book
- Series:
- SPIE proceedings series MEMS reliability for critical applications
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Reliability--Congresses.
- Microelectromechanical systems.
- Place of Publication:
- [Place of publication not identified] SPIE 2000
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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