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Micro-Optics and MOEMS : 22-24 May 2018, Beijing, China / edited by Yuelin Wang, Huikai Xie.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering.
- Proceedings of SPIE--the International Society for Optical Engineering
- Language:
- English
- Subjects (All):
- Microfabrication--Congresses.
- Microfabrication.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource : illustrations (black and white).
- Place of Publication:
- Bellingham, Washington : SPIE, 2018.
- Notes:
- Includes bibliographical references and index.
- Description based on: online resource; title from PDF information screen (SPIE, viewed May 03, 2023).
- ISBN:
- 1-5106-2339-6
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