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Modeling aspects in optical metrology VI : 26-28 June 2017, Munich, Germany / Bernd Bodermann, Karsten Frenner, Richard M. Silver, editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10330.
- Proceedings of SPIE ; Volume 10330
- Language:
- English
- Subjects (All):
- Optical measurements--Congresses.
- Optical measurements.
- Integrated circuits--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (513 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2017.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 20, 2018).
- ISBN:
- 1-5106-1106-1
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